Reliable Support for Critical Vacuum and Semiconductor Systems
EBARA Technologies provides award-winning vacuum pump service and support to customers across a wide range of industries. Because our customers depend on maximum uptime, we deliver fast, dependable service backed by our 160,000-square-foot ISO-certified headquarters in Sacramento, California. Combined with our strategically located Quick Response Centers throughout North America, EBARA ensures responsive repair, remanufacturing, and technical support whenever it’s needed.
Our Service Capabilities
Vacuum Pump Service & Repair
Comprehensive repair and remanufacturing services for EBARA and non-EBARA vacuum pumps. Our technicians restore pumps to OEM performance standards to extend equipment life and minimize downtime.
Field Engineering Services
Factory-trained engineers provide on-site diagnostics, maintenance, and system support for vacuum pump and abatement equipment, helping keep your operations running reliably.
CMP & Plating Engineering Services
Advanced semiconductor process testing and development support for Chemical Mechanical Polishing (CMP) and wafer plating systems, enabling process optimization and performance improvements.
EBARAClean Parts Cleaning Services
Precision parts cleaning and refurbishment services designed to remove contamination, restore surfaces, and extend the life of critical semiconductor components.
