Compact Wet Scrubber
Abatement Solutions
Ebara Technologies’ wet scrubber system provide fuel-free, cost-effective exhaust gas abatement with high uptime and compact front-access maintenance, making them ideal for space-limited sub-fab environments, like the Model G-WS.
Model G-WS
Flow Capacity 1000 L/min
Maximum Inlet Connections 4 inlet ports
Zero fuel
The Model G-WS is a wet-type exhaust abatement system designed for low-cost installation and operation with no fuel requirement, delivering high uptime through EBARA’s proven byproduct countermeasures. With front-only maintenance access and a compact footprint, it efficiently treats water-soluble gases such as NH3, DCS, TiCl4, WF6, HF, and HCl at room temperature, making it ideal for space-limited sub-fab environments.
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