High-Efficiency Combustion-Wash Abatement Solutions
Ebara Technologies’ combustion-wash (burner washer) abatement lineup delivers high-efficiency exhaust gas treatment for a wide range of semiconductor and industrial processes, achieving destruction efficiencies above 99% for challenging gases such as PFCs. Designed for maximum safety and lowest cost of ownership, these systems feature corrosion-resistant construction, city-water operation, long maintenance intervals, automatic internal cleaning, and multiple operating modes to reduce utility consumption. With models like the G5, G6-E, LPCMN, and TND series, EBARA offers flexible solutions for high-flow, high-byproduct, and specialized chemistries while supporting low NOx/COx emissions and improved tool uptime.
Model LPCMN
Flow Capacity 600L/min
Maximum Inlet Connections 4 or 6-inlet ports
Fuel Options hydrogen, city gas, propane
The Model LPCMN is a next-generation exhaust gas abatement system developed for semiconductor manufacturing, offering improved durability and performance with effective detoxification of advanced process gases while minimizing reactive by-products. Featuring a compact design with a two-stage combustion burner, hydrogen fuel capability, up to 600 L/min airflow, and reduced NOx/COx emissions, it supports longer uptime and stable production.
Model G5
Flow Capacity 350 – 1200L/min
Maximum Inlet Connections 4 or 6 inlet ports
Fuel Options city gas, propane gas
The Model G5 is a combustion-type exhaust abatement system that efficiently treats a wide range of manufacturing gases, including difficult-to-abate PFCs, with batch processing and byproduct removal to reduce operating costs. Designed for semiconductor, display, solar, chemical, and R&D applications, the series includes large-capacity models with flow rates up to 1,200 L/min.
Model G6
Flow Capacity 400L/min
Maximum Inlet Connections 4 inlet ports
Fuel Options city gas, propane gas
The Model G6-E is a compact combustion-type exhaust abatement system designed for semiconductor processes, capable of simultaneously treating large volumes of hydrogen (up to 200 L/min) and chlorine gases with standard byproduct removal to reduce maintenance and operating load.
Model TND
Flow Capacity 400L/min (per burner)
Maximum Inlet Connections 4 inlet ports
Fuel Options city gas, propane gas
The Model TND Series is a combustion-type exhaust abatement system engineered for low NOx and CO emissions, featuring advanced corrosion and byproduct countermeasures that extend maintenance intervals up to three times longer than conventional systems. With low utility consumption and configurations including TND-Single and TND-Single Plus, it delivers efficient abatement and reduced operating costs even in high byproduct processes.
Features
Similar Products
