Engineering the Flow of Tomorrow
At Ebara Technologies, we develop advanced vacuum and process solutions for high-tech manufacturing. Our technologies help manufacturers and researchers create the innovations shaping tomorrow’s world.
Ahead, Beyond
Expanding the Frontiers of Technology
Careers
Creating New Possibilities & Opportunities to Innovate
Dry Pumps
Industrial Efficiency With Dry Pump Innovation
EBARA Technologies, Inc. is a subsidiary of the EBARA Corporation
Precision Machinery Company
Learn about our divisions & solutions below.
Vacuum and Abatement systems for Reliable, High-uptime Manufacturing
Our Components Division manufactures and services advanced vacuum, abatement and exhaust management equipment built for uptime, performance, and sustainability. Explore our technologies below.
Dry Vacuum Pumps
Oil-free, reliable vacuum solutions for
semiconductor, R&D, and industrial applications.
High uptime • Low TCO
Turbomolecular Pumps
Ceramic-bearing reliability and compact design for ultra-high vacuum environments.
30,000+ hours durability
Point-of-Use Abatement Systems
Greatest flexibility for exhaust gas abatement for the effluent gases used in both semiconductor and photovoltaic manufacturing.
High DRE
Thermal Solutions
Precise temperature control solutions for semiconductor process heating applications.
High Precision • Flexible Heating Systems
Precision Chillers
Compact, energy-efficient chillers designed for precise semiconductor process cooling.
±0.1°C Control • Low GWP Refrigerants
Advanced Manufacturing Systems for Next-Gen Fabs
Our Systems Division delivers comprehensive planarization and bevel-edge polishing systems for advanced wafer manufacturing.
Chemical Mechanical Planarization Systems
High-throughput planarization for Cu, oxide, tungsten and STI materials.
Best-in-class planarization
Bevel Polishing Systems
Defect-free wafer edge and bevel polishing with contact-free, fixed abrasive technology.
Versatile edge control • High throughput
Plating System
High-speed, high-uniformity electroplating for advanced panel-level packaging applications
Superior Uniformity Performance
Explore Careers at EBARA Technologies and Grow Your Future With Us
Grow with us through hands-on experience and training. We welcome mechanics, technicians, and newcomers to the semiconductor industry from all backgrounds.
Need Support?
We’re here to keep your operations running smoothly. Whether you need repairs, troubleshooting assistance, or replacement parts, our technical support team is ready to help. Access downloadable spec sheets, operating manuals, and product brochures for quick reference, or contact us to schedule a service call.
