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> Products > Thermal Solutions

Thermal Solutions

Precision. Performance. Full heater control at your fingertips.

Advanced Temperature Control and Heating Solutions

Ebara Technologies’ thermal solutions provide precise, reliable temperature control across a wide range of process heating applications, combining advanced control systems with high-performance heating technologies. The portfolio includes the VSN® Temperature Control System, cloth heater jackets, nitrogen heater boxes, gasline heaters, VMB heaters, and heat tape with insulation to deliver uniform heat, intuitive control, and dependable performance.

Ebara VSN Heater Control System

Ebara VSN Heater Control System

Performance

Performance advanced temperature, safety, diagnostics, and power-savings features

Communication Protocols

Communication Protocols Modbus TCP/IP and Modbus-RTU via RS-485

System Capacity

System Capacity controls up to 8 strings with up to 128 temperature modules per string

EBARA’s advanced PID Temperature Control System delivers precision control across up to 1,024 independent heater zones, with real-time visibility via a full-color touchscreen, remote monitoring, and intelligent alerts.

Ceramic Fiber Cloth Heater Jackets

Ceramic Fiber Cloth Heater Jackets

Performance

Performance high temperature capability

Build Quality

Build Quality quality components and construction

System Capacity

System Capacity modules per string configuration available

Flexible, fully custom heater designs that fit your process without added design costs. We know that every heating requirement is different, so we design what you need, when you need it.

Nitrogen Heater Box

Nitrogen Heater Box

Performance Capability

Performance Capability high flow capability

Control & Integration

Control & Integration alarm signal communication with customer tool

Design & Technology

Design & Technology plug-and-play with 10-inch touchscreen display

Ebara Technologies has developed an innovative, fast-response heater designed to heat nitrogen gas up to 200 °C. With a flow capacity of 300 SLM, it provides a reliable source of heated dilution gas for stable, efficient process operation.

Gasline Heaters

Gasline Heaters

Performance Capability

Performance Capability customizable control levels

Control & Integration

Control & Integration expandable system architecture

Design & Technology

Design & Technology bendable jackets with reusable fasteners

Ebara Technologies can provide reliable gas line heating that prevents condensation, preserves gas purity, and ensures consistent process performance through uniform, safely controlled thermal management.

VMB Heaters

VMB Heaters

Performance Capability

Performance Capability multi-point monitoring and control

Control & Integration

Control & Integration form-fit heating system integration

Design & Technology

Design & Technology tailored designs without added fees

Ebara Technologies delivers fully engineered VMB heating solutions to protect gas integrity, and ensure stable, repeatable performance through uniform heat distribution. All designs include integrated safety protection and custom-fit solutions for seamless thermal control you can trust.

Heat Tape and Insulation

Heat Tape and Insulation

Performance Capability

Performance Capability flexible insulation solutions

Control & Integration

Control & Integration standard part number availability

Design & Technology

Design & Technology short lead times for deployment

Ebara Technologies heat tape and insulation solutions provide quick, flexible, and efficient thermal management for rapid deployment across a wide range of gas line and process heating applications.

Features

Precise and stable temperature control for critical process applications.
Designed specifically for semiconductor manufacturing environments.
Modular and scalable configurations to support system expansion.
Compact, space-saving designs for facility flexibility.
Easy installation and seamless tool integration.
Durable, high-quality construction for long service life.
Flexible customization to meet unique process requirements.
Reliable operation that supports maximum uptime.
Advanced monitoring and control capabilities for enhanced performance.
Engineered to improve process stability and yield.

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