RMA Request

"*" indicates required fields

This field is for validation purposes and should be left unchanged.

Customer Details

Is a Formal Quote Needed Before a PO Can Be Generated?*
Warranty Request*
Max. file size: 256 MB.
Please upload a copy of your EH&S form
Max. file size: 256 MB.
> Service/Support > Field Service

Field Engineering Services

On-site expertise to maintain, troubleshoot, and optimize your vacuum pump and abatement systems.

Field Engineering Support

EBARA’s field engineering team provides on-site troubleshooting, repair, and preventive maintenance for vacuum and abatement systems. With over 20 years of experience, we support both EBARA and non-EBARA equipment to keep critical operations running smoothly.

Our vacuum pump and repair services include servicing for:

Dry Vacuum Pumps
Point-of-Use Abatement Systems
Precision Chillers
Exhaust Line Heater and Controls
Mass Flow Controllers
Specialty Process Kit Parts Cleaning

Service Process & Support

Flexible service options designed to restore performance, extend pump life, and minimize downtime.

Field Service Capabilities

Expert on-site support to keep your vacuum and abatement
systems running at peak performance.

On-site equipment troubleshooting and diagnostics
Preventive maintenance and repair services
Pump exchange coordination and logistics
Equipment installation and startup support
Maintenance support for EBARA and non-EBARA systems

Why Choose EBARA

Proven expertise and factory-trained engineers you can
rely on for critical system support.

Factory-trained service engineers
Experience servicing competitor equipment
Extensive vacuum pump and abatement expertise
Responsive on-site service support
Single-source support for system maintenance

How to Request Field Service

Fast and simple service requests to get expert engineering
support when you need it most.

Contact our service team to request field support
Our engineers evaluate your service needs
A field service engineer is scheduled for on-site support
Equipment is inspected, repaired, and returned to operation

Contact us

For field service inquiries:

(800) 535-5376

Quality Services

Trusted service solutions designed to keep your systems operating reliably and efficiently.

Expert Technical Support

Our engineers provide responsive support to diagnose issues and keep your systems running.

Factory-Trained Technicians

Service is performed by highly trained professionals with deep knowledge of EBARA equipment and systems.

Comprehensive Diagnostics

Advanced troubleshooting and system evaluation help identify issues quickly and restore optimal performance.

Quality Service Standards

Every service follows strict quality procedures to meet OEM performance and reliability expectations.

Genuine Ebara Parts

We use genuine EBARA components to ensure reliability, compatibility, and long-term system performance.

Responsive Service Updates

Our team keeps you informed throughout the service process with clear communication and status updates.

Need Help?

Need further assistance? We’re here to help.

Contact Us
Shopping Cart
Scroll to Top