Compact Low-GWP
Precision Chiller Systems
Ebara Technologies’ RJ-CA and RJ-XA Series are compact, energy-efficient chiller systems designed for semiconductor manufacturing equipment, featuring advanced inverter control technology for improved performance and reduced power consumption. Using environmentally friendly refrigerants like CO₂ and low-GWP R513A, these models support global compliance while delivering precise temperature control and corrosion-resistant designs to enhance process stability, yield, and tool uptime.
Model RJ-CA
Refrigerant Type CO2 refrigerant with GWP = 1
Temperature Stability +/- 0.1C
Energy Saving
The Model RJ-CA uses natural refrigerant (CO2) for semiconductor manufacturing equipment. The built-in ultra-compact canned pump and Ebara’s inverter control technology save space and energy. ± 0.1°C temperature control is possible, contributing to improved process stability and yield.
Model RJ-XA
Refrigerant Type low-GWP refrigerant with GWP <600
Temperature Stability +/- 0.1C
Energy Saving
The Model RJ-XA uses a low GWP* refrigerant (R513A) that complies with global and USA environmental regulations. Does not use copper or brass materials for wetted parts. Stainless steel brazing process reduces the risk of corrosion and tool downtime. Energy efficient pump with inverter control reducing power consumption.
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