Turbomolecular Pumps
For High-Vacuum Performance
Ebara Technologies’ turbomolecular pump portfolio delivers clean, reliable, and high-performance vacuum solutions across a wide range of high-vacuum applications. The EBT and EMT series offer efficient, durable options with robust designs that withstand shock and support applications from UHV to analytical and semiconductor processes, while the MK and MK-R series provide higher pumping speeds, greater throughput, and advanced maglev technology for demanding multi-process and industrial environments.
Model EBT
Performance 70 – 2400l/s
Ceramic Bearing any orientation
Cost Effective best value
The EBT series are highly efficient, cost-effective solutions that provide clean and reliable vacuum generation for your high vacuum applications. The new compound design rotors can withstand infrequent shock treatment during high flow or vent conditions. Improved efficiency results in higher pumping speeds and gas compression. This accommodates higher foreline pressures making them ideal for multiple applications including UHV, mobile vacuum carts, and analytical systems.
Model EMT
Performance 340 – 2400L/sec
Multi-process corrosives, radiation, Ultra Low Vibration
Process Capability up to 3slm N₂
The EMT Series are magnetically levitated bearing compound turbomolecular pumps. Each model in the range offers exceptional value and is equipped with the latest active maglev technology for years of reliable trouble free operation. Our robust design can withstand infrequent shock treatment during high flow or vent conditions and the special coated corrosive resistant models handle the harshest chemistries. Multiple applications include: semiconductor processes, in line coaters, UHV, beamlines, radiation-hardened, magnetically-shielded, and ultra-low vibration models.
Model MK
Performance 1650 – 4200L/sec
Compact integrated controller
Process Capability up to 4.4slm N₂
The MK series offers increased performance over the EMT range. An all in one installation with integrated onboard controller and a choice of various industrial communication modules. The MK series produces higher pumping speeds and throughput up to 4200l/s. Multi-process versions – UHV, inline coaters, e-beam systems and corrosive processes.
Model MK-R
Performance 1650 – 4200L/sec
Compact Remote controller
Process Capability up to 7slm N₂
The MK-R Series are magnetically levitated bearing compound turbomolecular pumps. A higher performance option with higher throughput capabilities than EBARA’s line of EMT MagLev turbomolecular pumps. The MagLev Bearing – Model MK-R series offer highly efficient, cost-effective solutions that provide clean and reliable vacuum generation for your high vacuum applications.
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