Dry Catalyst and Absorption Abatement Solutions
Ebara Technologies’ catalyst/absorption abatement systems, including the GT, FDS100S, and FDS250, deliver safe and highly efficient exhaust gas treatment without the need for water scrubbing or wastewater infrastructure. Designed for hazardous substances and PFC gas removal, these solutions range from compact lab units to high-capacity systems built for maximum uptime.
Model GT
Flow Capacity 80 – 100L/min
Canisters single/dual
Zero Fuel
The Model GT is a dry abatement system designed to safely treat hazardous substances such as arsenic and phosphorous without the need for water scrubbing, using process-specific adsorbents to support a wide range of applications.
Model FDS100S
Flow Capacity 100 L/min
Reactors single-cylinder
Zero Fuel
The Model FDS100S is a compact dry exhaust abatement system designed to safely abate over 99.9% of PFC gases without the need for water, fuel, or wastewater treatment, making it ideal for research labs and facilities with limited infrastructure. Using a heated proprietary catalyst, it efficiently treats up to 100 L/min of inlet gas while producing no hazardous byproducts.
Model FDS250
Flow Capacity 250 L/min
Reactors dual-cylinders
Zero Fuel
The Model FDS250 is a high-capacity dry fluorine scrubber capable of treating up to 250 L/min of PFC gases with greater than 99.9% efficiency, utilizing a dual-canister serial flow design for maximum uptime. Requiring no water or special fuels, it generates zero wastewater and no hazardous byproducts, offering a sustainable, low-infrastructure solution for advanced semiconductor and industrial applications.
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