
Ozone Systems for High-Purity Ozone Generation
Ebara Technologies’ ozone systems include the OZC and OZW Series, delivering high-purity, ultra-high concentration ozone through advanced oxygen ionization and EBARA’s proprietary trench discharge technology. Designed for efficient, large-volume ozone generation, these systems support a wide range of demanding applications.

Ultra-High Concentration Clean Ozonizer – OZC Series
Performance ultra-high concentration ozone generation
Purity & Cleanliness virtually impurity-free ozone gas
Core Technology proprietary trench discharge cell design
The Ultra High Concentration Clean Ozonizer (Ozone Gas Generator, OZC) produces high concentrations of virtually impurity free ozone gas by using a unique trench discharge cell system developed by EBARA.

Ozonized Water Generator – OZW Series
Performance high-volume ozone production capability
Purity & Cleanliness designed for clean ozone generation
Core Technology oxygen ionization-based ozone generation
The Ozonized water generator is capable of continuously feeding clean Ozonized water to meet the requirements of next-generation wet processes through the use of the high concentration ozone generator, OZC Series, a Teflon® hollow fiber membrane and the particle-free pump.
