Particulate and Condensable
Gas Traps
EBARA Technologies’ traps protect vacuum pumps and downstream equipment by capturing particles and condensable by-products, with offerings that include particulate traps for solid contamination control, water-cooled traps for condensing harmful process gases, and custom traps engineered to meet specific application requirements.
Particulate Traps
Filtration Efficiency captures harmful particles before pumps
Thermal Compatibility supports wide temperature ranges
Serviceability easy cleaning and filter replacement
Particulate traps remove solid particles from the process stream to prevent mechanical pump contamination, using high-efficiency filters designed for a wide range of temperatures and particle loads.
Water-cooled Traps
Condensation Performance maximized cooling and residence time
Thermal Compatibility maximized cooling and residence time
Serviceability fast, spill-free maintenance
Water-cooled traps condense and capture process gases and by-products before they reach downstream equipment, extending pump life and reducing maintenance through efficient heat exchange.
Specialty Traps
Application Optimization tailored to process requirements
Design Flexibility custom sizes and configurations
Serviceability designed for easy maintenance
The EST Series covers a wide pumping speed range from 35 CFM exceeding 1,765 CFM with ultimate pressures as low as 3 mTorr or 0.5 Pascal. EST dry (oil free) vacuum pumps are designed as stand-alone screw pumps constructed of NiResist, a solid cast material known for its superior corrosion resistance, best suited for harsh, powdery and corrosive applications.
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