Join Ebara Technologies at SEMICON West 2025!
We are excited to announce that Ebara Technologies will be exhibiting at SEMICON West 2025, the premier event for the semiconductor industry. The show takes place October 7-9, 2025, at the Phoenix Convention Center in Phoenix, Arizona.
Find us at Booth #743
As a global leader in advanced semiconductor manufacturing solutions, Ebara Technologies is proud to showcase our latest technologies and services that drive performance, reliability, and sustainability across the industry.
- Insights from our experts on next-generation process solutions
- Networking opportunities to discuss how Ebara can support your roadmap
- Exclusive resources and materials for booth visitors
SEMICON West 2025 is your chance to meet our team and see our innovations in action. Mark your calendar today and plan to stop by Booth #743.
We look forward to connecting with you in Phoenix this October.
Discover Ebara’s Product Lineup
LA+ Abatement
Specifications
- Maximum Inlet Connections: 4 (6-inlet model to be released in 2025)
- Maximum Gas Inflow: 600 L/min (future high-capacity versions planned)
- Dimensions (W × D × H): 1200 × 700 × 990 mm
- Fuel Options: Hydrogen, city gas, propane
G-WS1000 Wet Scrubber
Specifications
- Target Gases: Water-soluble and water-reactive compounds
- Abatement Method: Point-of-Use wet scrubbing
- Design Features: High-efficiency gas neutralization, compact footprint
EV-X Dry Vacuum Pump
Specifications
- Pumping Speeds: 2,000–80,000 L/min (70–2,800 CFM)
- Ultimate Pressure: < 0.5 Pa (3.75 mTorr)
- Technologies: Roots and Screw with corrosion-resistant options
- Design Features: Small footprint, energy-saving architecture
EMT2200MK Turbomolecular Pump
Specifications
- Pumping Speeds: : 2,200 L/sec
- Bearing Type: Magnetic Levitation (MagLev)
- Inlet Flange Options: ISO-F250, CF250
- Design Features: Vibration-free operation, oil-free vacuum, high reliability
Cloth Heater Jackets
Specifications
- Temperature Range: Up to 220°C (260°C with high-limit thermostat)
- Power: 120–600 VAC/DC, single or three-phase
- Design Features: Flexible sizing, reusable, easy hook-and-loop installation
RJ-CA Precision Chiller
Specifications
- Temperature Stability: ±0.1°C
- Refrigerant Type: Natural CO₂
- Pump Type: Ultra-compact canned pump
- Control System: Ebara inverter technology for energy efficiency
