Setting the Bar, A Testament to Unparalleled Reliability
It all started in September 1995, when an Ebara A70W dry vacuum pump was installed on a Lam Oxide Etcher at National Semiconductor’s facility in South Portland, Maine. This multistage roots type dry vacuum pump, with a pumping speed of 297 CFM and an ultimate pressure of 1 mTorr, ran continuously for 247,801 hours (>28 years); having never been rebuilt, swapped, or exchanged over the course of its life and with one oil change performed in July 2015. This pump has become a symbol of durability and dependability.
In the early 1990s, semiconductor high-volume manufacturing line-widths were approximately 350nm. That evolved to 250nm in the early 2000s, and then an astonishing 10nm by 2017. During this time the Fab changed ownership multiple times: originally Fairchild Semiconductor, in 2016 to ON Semi, and in 2022 to Diodes Inc.
Ebara Technologies Inc., established in 1991 as a subsidiary of Ebara Corporation Precision Machinery Company, stands out as a leading provider of equipment delivering outstanding performance year after year.
The story of the Ebara A70W dry pump is more than remarkable engineering; it’s a testament to the reliability and durability of Ebara’s equipment. In an industry where downtime can have significant financial consequences, the Ebara A70W dry pump has proven to be a vital asset, providing nearly three decades of uninterrupted service. This level of reliability is what sets us apart as the go-to choice for companies looking for dependable equipment that stand the test of time.
MagLev Turbo Upgrade Kits Semiconductor OEM Tools
Replacing obsolete turbomolecular pumps in semiconductor manufacturing is crucial for maintaining efficiency and reliability. Turbo pumps are essential for creating the high-vacuum environments needed in various semiconductor processes, such as etching and deposition. Over time, older models can become less efficient, leading to increased maintenance costs and potential downtime. Many of the original specified turbo models are now obsolete and difficult to source parts or repair.
Upgrading with Ebara’s OEM retrofit kits offers several benefits. Our latest ‘7’ Series Maglev models are designed with advanced materials and technologies that enhance performance and durability. Featuring improved energy efficiency, reducing operational and maintenance costs, vital for successful fab operations.
The Ebara ‘7’ Series Maglev range supports multiple tools and processes. Including AMAT P5000/Centura/Ultima, Lam Rainbow/Alliance, Novellus Speed, Plasma-Therm, SPTS/KLA and TEL platforms. Contact us today for a quote or just more information and ensure your production lines remain competitive and capable of meeting future AI demands.
Upcoming Events
Northern California AVS
- Location: Marriott Silicon Valley, Fremont, CA
- Date: February 27, 2025
- Time: 10:00 a.m. – 6:00 p.m.
FOA Annual Collaborative Forum
- Location: Wigwam Resort, Litchfield, AZ
- Date: February 26-27, 2025
